DocumentCode
2533176
Title
Nonlinear dynamics in nanomechanical oscillators
Author
Zaitsev, Stav ; Almog, Ronen ; Shtempluck, Oleg ; Buks, Eyal
Author_Institution
Dept. of Electr. Eng., Technion-Israel Inst. of Technol., Haifa, Israel
fYear
2005
fDate
24-27 July 2005
Firstpage
387
Lastpage
391
Abstract
In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. The beam is driven into nonlinear regime of oscillations and the response is measured by an electron beam displacement detector. In one set of experiments we study the impact of nonlinear damping on the dynamics in the bistable regime of operation. For data analysis we introduce a nonlinear damping term to Duffing equation. The experiment shows conclusively that accounting for nonlinear damping effects is needed for correct modeling of the dynamics. In another set of experiments we study intermodulation mechanical gain near the onset of bistability. As predicted by a theoretical analysis, we find high intermodulation gain when the system is operated close to a bifurcation.
Keywords
electron beam lithography; gold alloys; micromechanical devices; nonlinear dynamical systems; oscillators; palladium alloys; Duffing equation; PdAu; bifurcation; bulk nanomachining; e-beam lithography; electron beam displacement detector; intermodulation mechanical gain; nanomechanical doubly clamped beam; nanomechanical oscillators; nonlinear damping impact; nonlinear dynamics; Bifurcation; Damping; Displacement measurement; Electrodes; Fabrication; Magnetic force microscopy; Magnetic resonance; Mechanical sensors; Nanoelectromechanical systems; Oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.88
Filename
1540859
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