DocumentCode :
2533293
Title :
Thermal stability of IrO2 nanowires
Author :
Zhang, Fengyan ; Barrowcliff, Robert ; Hsu, Sheng Teng
Author_Institution :
Sharp Labs of America, Camas, WA, USA
fYear :
2005
fDate :
24-27 July 2005
Firstpage :
418
Lastpage :
420
Abstract :
The thermal stability of IrO2 nanowires has been studied. First single crystal IrO2 nanowires with the diameter at 10-30 nm and length at about 500 nm were synthesized using MOCVD system. Then the nanowires were annealed in oxygen and nitrogen ambient separately at different temperatures. It shows that under oxygen annealing the IrO2 nanowires become unstable at around 800°C. After 900°C annealing, the IrO2 nanowires melted and vaporized. On the other hand, under nitrogen annealing at 800°C the IrO2 nanowires were reduced to Ir, after further annealing in nitrogen at 900°C, the IrO2 nanowires were completely reduced to Ir and also the IrO2 nanowires fragment into Ir particles.
Keywords :
annealing; iridium compounds; nanotechnology; nanowires; thermal stability; 10 to 30 nm; 500 nm; 800 C; 900 degC; IrO2; MOCVD system; oxygen annealing; single crystal IrO2 nanowires; thermal stability; Annealing; Copper; MOCVD; Nanoelectronics; Nanowires; Nitrogen; Solids; Temperature sensors; Thermal stability; X-ray scattering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
Type :
conf
DOI :
10.1109/ICMENS.2005.125
Filename :
1540866
Link To Document :
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