Title :
Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage
Author :
Takamatsu, Hikaru ; Sugiura, Toshihiko
Author_Institution :
Dept. of Mech. Eng., Keio Univ., Yokohama, Japan
Abstract :
Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.
Keywords :
bifurcation; electrostatic actuators; vibrations; AC applied voltage; DC applied voltage; beam-type actuator; bifurcation; electrostatic MEMS; electrostatic actuators; forced vibration; nonlinear vibration; parametric resonance; spring-mass system; Bifurcation; Damping; Electrodes; Electrostatics; Equations; Frequency response; History; Micromechanical devices; Resonance; Voltage;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.89
