DocumentCode
2533381
Title
RF MEMs tunable inductor using bimorph microactuators
Author
Zine-El-Abidine, Imed ; Okoniewski, Michal ; McRory, John G.
fYear
2005
fDate
24-27 July 2005
Firstpage
436
Lastpage
437
Abstract
Inductors play an important role in wireless front-end circuitry. Tunable inductors can provide more flexibility in optimizing RF devices such as filters and VCOs. A tunable inductor using a process fully compatible with CMOS has been constructed. The tuning range achieved was 30%.
Keywords
inductors; microactuators; radiofrequency filters; radiofrequency oscillators; CMOS; RF MEMs tunable inductor; RF devices; bimorph microactuators; filters; micromachining; microwave circuits; tunable circuits; tuning range; wireless front-end circuitry; Actuators; Coils; Inductance; Inductors; Microactuators; Micromachining; Radio frequency; Radiofrequency microelectromechanical systems; Tunable circuits and devices; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN
0-7695-2398-6
Type
conf
DOI
10.1109/ICMENS.2005.105
Filename
1540871
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