Title :
Verifying finite element simulation for a piezoresistive MEMS sensor
Author :
Benfield, D. ; Moussa, W. ; Lou, E.
Author_Institution :
Alberta Univ., Edmonton, Alta., Canada
Abstract :
The use of finite element analysis to simulate the performance of a piezoresistive sensor is a technique that potentially allows for more efficient design and revision of MEMS devices. By comparing the performance of a FEA pressure sensor to that of an actual device as manufactured allows the capabilities of current simulation software in this field to be examined.
Keywords :
finite element analysis; microsensors; piezoresistive devices; FEA pressure sensor; current simulation software; finite element simulation; piezoresistive MEMS sensor; Analytical models; Biomembranes; Finite element methods; Manufacturing processes; Mechanical sensors; Micromechanical devices; Piezoresistance; Silicon devices; Solid modeling; Virtual manufacturing;
Conference_Titel :
MEMS, NANO and Smart Systems, 2005. Proceedings. 2005 International Conference on
Print_ISBN :
0-7695-2398-6
DOI :
10.1109/ICMENS.2005.131
