Title :
A novel narrow mist spray device using surface acoustic wave with a channel
Author :
Yabe, Atsushi ; Hamate, Yuichiro ; Nagasawa, Sumito ; Kuwano, Hiroki
Author_Institution :
Dept. of Nanomech., Tohoku Univ., Sendai, Japan
Abstract :
This paper presents a novel device which can atomize a droplet into narrow mist spray using surface acoustic wave (SAW). A channel was cut into piezoelectric substrate between two IDT electrodes which drives SAWs in opposing directions. Then, SAW streaming in opposing directions are isolated in both sides of the channel, which converged atomized mist into narrow mist spray, whose width is nearly 1/4 compared with that of no-channel device.
Keywords :
drops; sprays; surface acoustic wave devices; surface acoustic waves; IDT electrodes; SAW; droplet; narrow mist spray device; piezoelectric substrate; surface acoustic wave; Electrodes; Reflectivity; Resists; Substrates; Surface acoustic wave devices; Surface acoustic waves; Rayleigh wave; Surface acoustic wave (SAW); atomization;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969446
