DocumentCode :
2534213
Title :
The nanostructured OrigamiTM 3D fabrication and assembly process for nanomanufacturing
Author :
In, Hyun Jin ; Arora, Will ; Buchner, Tilman ; Jurga, Stanley M. ; Smith, H. Enry I ; Barbastathis, George
Author_Institution :
Dept. of Mech. Eng., Massachusetts Inst. of Technol., Cambridge, MA, USA
fYear :
2004
fDate :
16-19 Aug. 2004
Firstpage :
358
Lastpage :
360
Abstract :
Nanostructured OrigamiTM 3D fabrication and assembly process is a method of manufacturing 3D nanosystems using exclusively 2D litho tools. The 3D structure is obtained by folding a nanopatterned 2D substrate. We report on the materials, actuation, and modeling aspects of the manufacturing process, and present experimental results from fabricated structures.
Keywords :
microassembling; nanopatterning; nanostructured materials; photolithography; 2D litho tools; 3D nanosystem manufacturing; 3D structure; Si; assembly process; nanopatterned 2D substrate; nanostructured OrigamiTM 3D fabrication; Assembly; Biomembranes; Electron beams; Energy storage; Fabrication; Fasteners; Lithography; Manufacturing processes; Nanostructured materials; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
Type :
conf
DOI :
10.1109/NANO.2004.1392350
Filename :
1392350
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2534213
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