A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics

Author

Zhang, Q.X. ; Du, Y. ; Tan, C.W. ; Zhang, J. ; Yu, M.B. ; Lo, G.Q. ; Kwong, D.L.

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2011

fDate

5-9 June 2011

Firstpage

1795

Lastpage

1798

Abstract

This paper presents a novel MEMS configuration for three dimensional on-chip fine positioning and mechanical fixing of a ball lens. A MEMS lens holder, which consists of a suspended mass, is attached onto a MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail.

Keywords

microfabrication; packaging; MEMS lens holder; ball lens; fabrication process; mechanical fixing; silicon photonics packaging; size 300 mum; three dimensional fine positioning; Actuators; Lenses; Micromechanical devices; Photonics; Silicon; Springs; Suspensions; Active alignment; Lens holder; MEMS; Mechanical locking; Packaging; Si-photonics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969466

Filename

5969466