Title :
A novel MEMS configuration for three dimensional fine positioning and mechanical fixing of a ball lens in the packaging of silicon photonics
Author :
Zhang, Q.X. ; Du, Y. ; Tan, C.W. ; Zhang, J. ; Yu, M.B. ; Lo, G.Q. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
This paper presents a novel MEMS configuration for three dimensional on-chip fine positioning and mechanical fixing of a ball lens. A MEMS lens holder, which consists of a suspended mass, is attached onto a MEMS active alignment platform to achieve precision alignment and fixing of a ball lens with a diameter of 300μm in silicon photonics packaging. The operational principles of the system as well as the design, simulation, fabrication process of the lens holder are discussed in detail.
Keywords :
microfabrication; packaging; MEMS lens holder; ball lens; fabrication process; mechanical fixing; silicon photonics packaging; size 300 mum; three dimensional fine positioning; Actuators; Lenses; Micromechanical devices; Photonics; Silicon; Springs; Suspensions; Active alignment; Lens holder; MEMS; Mechanical locking; Packaging; Si-photonics;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969466
