DocumentCode
2534636
Title
Electro-wetting enhanced bonding strength
Author
Cheng, Rong ; Jiang, Kewei ; Li, Xinxin
Author_Institution
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
fYear
2011
fDate
5-9 June 2011
Firstpage
858
Lastpage
861
Abstract
A novel method to enhance bonding strength by using electro-wetting-on-dielectric (EWOD) technique for electronic packaging is described in this paper. The method of liquid treatment is herein employed to enhance bonding strength due to that the low melting point of Sn has been widely used in electronic packaging. Based on the principle of EWOD, we have experimentally changed the contact angle of the molten Sn balls or ring-structure by varying electric energy across the thin dielectric film between the molten Sn and conducting Si substrate. The contact area between the Sn and the substrate can be enlarged due to the decrease of the contact angle. In our experiment, the bonding shear-strength is enhanced by at least 50% with the EWOD technique used. The significant enhancement of the bonding strength has been experimentally verified and has shown promise in flip-chip bonding and microsystem cavity hermetic packaging.
Keywords
bonding processes; dielectric thin films; electronics packaging; flip-chip devices; micromechanical devices; solders; wetting; EWOD technique; bonding shear-strength; electro-wetting-on-dielectric technique; electronic packaging; flip-chip bonding; liquid treatment; microsystem cavity hermetic packaging; ring-structure; Bonding; Dielectrics; Electronics packaging; Packaging; Silicon; Substrates; Tin; Bonding strength; Electro-wetting-on-dielectric; Electronic packaging; Solder joint;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969481
Filename
5969481
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