• DocumentCode
    2534636
  • Title

    Electro-wetting enhanced bonding strength

  • Author

    Cheng, Rong ; Jiang, Kewei ; Li, Xinxin

  • Author_Institution
    State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    858
  • Lastpage
    861
  • Abstract
    A novel method to enhance bonding strength by using electro-wetting-on-dielectric (EWOD) technique for electronic packaging is described in this paper. The method of liquid treatment is herein employed to enhance bonding strength due to that the low melting point of Sn has been widely used in electronic packaging. Based on the principle of EWOD, we have experimentally changed the contact angle of the molten Sn balls or ring-structure by varying electric energy across the thin dielectric film between the molten Sn and conducting Si substrate. The contact area between the Sn and the substrate can be enlarged due to the decrease of the contact angle. In our experiment, the bonding shear-strength is enhanced by at least 50% with the EWOD technique used. The significant enhancement of the bonding strength has been experimentally verified and has shown promise in flip-chip bonding and microsystem cavity hermetic packaging.
  • Keywords
    bonding processes; dielectric thin films; electronics packaging; flip-chip devices; micromechanical devices; solders; wetting; EWOD technique; bonding shear-strength; electro-wetting-on-dielectric technique; electronic packaging; flip-chip bonding; liquid treatment; microsystem cavity hermetic packaging; ring-structure; Bonding; Dielectrics; Electronics packaging; Packaging; Silicon; Substrates; Tin; Bonding strength; Electro-wetting-on-dielectric; Electronic packaging; Solder joint;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969481
  • Filename
    5969481