Title :
SiC APDs and arrays for UV and solar blind detection
Author :
Sandvik, Peter M. ; Soloviev, Stanislav I. ; Vert, Alexey V. ; Bolotnikov, Alexander ; Frechette, Jonathan ; Verghese, Simon ; Grossmann, Peter ; Shaw, Gary A.
Author_Institution :
GE Global Res. Center, Niskayuna, NY, USA
Abstract :
We report advancements in APDs and arrays using 4H SiC. Novel structures, array designs and specialized read out integrated circuits have been developed towards the realization of UV and solar-blind detector arrays exhibiting appreciable quantum efficiency, low noise and Geiger-mode operation. Discussion will include the design, fabrication and testing of these devices, which may find use in a variety of applications.
Keywords :
Geiger counters; avalanche photodiodes; readout electronics; silicon compounds; ultraviolet detectors; wide band gap semiconductors; Geiger mode operation; SiC; UV detector; avalanche photodiodes; quantum efficiency; read out integrated circuits; solar blind detection; Detectors; Etching; Fabrication; Gamma ray detection; Integrated circuit noise; Semiconductor device noise; Sensor arrays; Silicon carbide; Timing; Working environment noise;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343240
