Title :
Fabrication of nanoelectrodes for hybrid molecular-electronic devices
Author :
Della Torre, Antonio ; Visconti, Paolo ; Maruccio, Giuseppe ; Amone, Eliana D. ; Krahne, Roman ; Manna, Liberato ; Rinaldi, Ross ; Cingolani, Roberto
Author_Institution :
INFM, Lecce Univ., Italy
Abstract :
Since the typical size of a biomolecule or nanocrystal is of the order of few nanometers, hybrid molecular-electronic (HME) devices require the fabrication of electrodes with nanometer separation. In this work, we report on fabrication of metallic electrodes with separation less than 10 nm combining electron beam lithography (EBL) and metal electrodeposition. The shape of the electrodes was tailored for the particular device application. Both nanocrystals and single molecules were connected to the electrodes to implement new functional devices.
Keywords :
chromium; electrodeposition; electron beam lithography; gold; molecular electronics; nanoelectronics; nanolithography; nanostructured materials; platinum; titanium; Cr-Au; Si-SiO2; Ti-Au; Ti-Pt; biomolecule; electron beam lithography; functional devices; hybrid molecular electronic devices; metal electrodeposition; metallic electrodes; nanocrystal; nanoelectrodes fabrication; Chromium; Electrodes; Fabrication; Geometry; Gold; Molecular electronics; Nanocrystals; Nanoscale devices; Scanning electron microscopy; Shape;
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
DOI :
10.1109/NANO.2004.1392384