A hybrid nanorobotic manipulation system integrated with nanorobotic manipulators inside scanning and transmission electron microscopes

A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric devices for driving in 3 translational degrees of freedoms (DOFs) and a passive 3-DOF sample stage driven by SEM nanorobotic manipulators. The nanomanipulation system has high enough resolution to identify nano-scale objects, e.g., carbon nanotube (CNT), due to the adoption of a TEM, and efficient and rapid nanomanipulations have been realized within wide enough working space of the SEM nanomanipulators.