Title :
NiFe-AAO nanocomposite for performance enhancement of on-chip spiral inductors
Author :
Chao, Tzu-Yuan ; Hsu, H.F. ; Chen, K.M. ; Cheng, Y.T.
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
The paper presents a CMOS-compatible process to implement NiFe-anodic alumina oxide (AAO) nanocomposite material as a magnetic core for on-chip spiral inductor fabrication. The NiFe nanorod array with ~70 nm in diameter and an aspect ratio of ~14 is electroplated using Ti as a conductive layer in an anodic alumina oxide (AAO) template on a silicon substrate. Experimental results show that the spiral inductor using a NiFe-AAO nanocomposite magnetic core can have more than 25% inductance enhancement without any Q degradation to GHz range.
Keywords :
CMOS integrated circuits; alumina; electroplating; ferromagnetic materials; inductors; iron compounds; magnetic cores; nanocomposites; nanorods; nickel compounds; silicon; titanium; CMOS compatible process; NiFe-Al2O3; Si; Ti; anodic alumina oxide; conductive layer; electroplating; magnetic core; nanocomposite; nanorod array; on-chip spiral inductor performance enhancement; silicon substrate; Eddy currents; Inductance; Inductors; Magnetic cores; Q factor; Spirals; System-on-a-chip; Ferromagnetic Nanorods; NiFe-AAO Nanocomposite; On-Chip Spiral Inductors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969528
