Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS applications

Author

Sun, Xuming ; Yuan, Quan ; Fang, Dongming ; Zhang, Haixia

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2011

fDate

5-9 June 2011

Firstpage

1392

Lastpage

1395

Abstract

In this paper, electroplated CoNiMnP permanent magnet arrays with different geometries and thickness have been designed, fabricated and tested. The arrays contain cylinder magnets with radius of 100μm, 150μm, and 200μm as well as cubic magnets with aspect ratio of 1, 3 and 10. It was observed that the retentivity and the energy density of cylinder arrays decreased as radius increased. For cubic arrays, the retentivity and the energy density rose with the increase of the aspect ratio. A high coercivity of 751Oe, a retentivity up to 8887Gs and an energy density of 17.4kJ/m³ were successfully achieved in cubic arrays. By modifying the geometry of the arrays, the retentivity and the energy density can be improved by up to 115% and 129%, respectively.

Keywords

cobalt alloys; electrodeposition; manganese alloys; microfabrication; nickel alloys; permanent magnets; phosphorus alloys; CoNiMnP; MEMS; cubic magnets; cylinder magnets; electrodeposition; fabrication; permanent magnet arrays; retentivity; size 100 mum; size 150 mum; size 200 mum; Geometry; Magnetic properties; Magnetomechanical effects; Micromechanical devices; Permanent magnets; Perpendicular magnetic anisotropy; Shape; CoNiMnP; Electrodeposition; Magnetic MEMS; Micro Fabrication; Permanent Magnet Arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969531

Filename

5969531