Title :
Effect of polar groups on the electrical breakdown strength of plasma polymer films
Author :
Nakano, Toshiki ; Fukuyama, Masao ; Ohki, Yoshimichi
Author_Institution :
Dept. of Electr. Eng., Waseda Univ., Tokyo, Japan
Abstract :
The electric breakdown field of plasma polymer films was studied by applying rectangular voltage pulses. The breakdown field increases by the incorporation of fluorine atoms into the film when the pulse width is shorter than 5 μs. This is due to the scattering of electronic carriers caused by C-F bonds
Keywords :
electric breakdown of solids; electric strength; organic insulating materials; polymer films; C-F bonds; breakdown field; electrical breakdown strength; electronic carrier scattering; plasma polymer films; polar groups; pulse width; rectangular voltage pulses; Breakdown voltage; Conductive films; Electric breakdown; Electric variables measurement; Electrodes; Plasma chemistry; Plasma measurements; Plasma properties; Polymer films; Pulse measurements;
Conference_Titel :
Properties and Applications of Dielectric Materials, 1988. Proceedings., Second International Conference on Properties and Applications of
Conference_Location :
Beijing
DOI :
10.1109/ICPADM.1988.38414
