A magnetostatic 2-axis MEMS scanner with I-section rib-reinforcement and slender permanent magnet patterns

This study demonstrates the 2-axis epitaxial silicon scanner driven by the coil-less magnetostatic force using electroplated permanent magnet (CoNiMnP) film. The present approach has four merits: (1) the process employs the cheap silicon wafer with epitaxial layer; and the electrochemical etching stop technique is used to precisely control the thickness of scanner; (2) the I-section rib-reinforced structure is implemented to provide high stiffness of the mirror plate; (3) the magnetostatic driving force on scanner is increased by electroplated permanent magnet film with slender patterns; (4) the size of packaged scanner is reduced since the assembled permanent magnets are not required.