Controlled growth of carbon nanotubes on microstructured surfaces

Author

Keles, Yanki ; Milas, Mirko ; Thommen, Verena ; Fahlbusch, Stephan ; Stöckli, Thomas ; Meyer, Ernst ; Forró, László ; Knapp, Helmut F.

Author_Institution

Centre Suisse d´´Electronique et de Microtechn. SA, Switzerland

fYear

2004

fDate

16-19 Aug. 2004

Firstpage

538

Lastpage

540

Abstract

Carbon nanotubes (CNTs) are known to enhance the scanning performance of AFM tips when mounted on AFM tips. There are different ways to synthesize CNTs, i.e. arc-discharge and chemical vapor deposition (CVD). CNTs have been directly grown on atomic force microscopy (AFM) tips by CVD. CNTs produced by arc-discharge method have been mechanically attached onto AFM tips to compare the performance of different types of CNTs. AFM images have been gathered with these CNT AFM tips. Present results show that arc-discharge CNT AFM tips have better scanning performances than the Si AFM tips.

Keywords

atomic force microscopy; carbon nanotubes; chemical vapour deposition; nanotechnology; plasma deposition; surface structure; AFM; C; arc discharge method; atomic force microscopy; carbon nanotube growth; chemical vapor deposition; microstructured surfaces; Atomic force microscopy; Atomic layer deposition; Carbon nanotubes; Chemical technology; Chemical vapor deposition; Large-scale systems; Materials science and technology; Mechanical factors; Physics; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2004. 4th IEEE Conference on

Print_ISBN

0-7803-8536-5

Type

conf

DOI

10.1109/NANO.2004.1392412

Filename

1392412