Title :
Individual single-walled carbon nanotubes with vertical alignment
Author :
Kato, T. ; Jeong, G.-H. ; Hirata, T. ; Hatakeyama, R. ; Tohji, K.
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Sendai, Japan
Abstract :
In this report, we demonstrate the successful synthesis of vertically-aligned single-walled carbon nanotubes (SWNTs) using plasma-enhanced chemical vapor deposition method. According to analysis by transmission electron microscopy, it is also found that short-length individual SWNTs are grown with one way aligned form. Furthermore, the correlation between SWNT growth and plasma effects has been also investigated in detail using a Langmuir probe and optical emission spectroscopy.
Keywords :
carbon nanotubes; luminescence; nanotechnology; plasma CVD; transmission electron microscopy; C; Langmuir probe; SWNT growth; optical emission spectroscopy; plasma effects; plasma enhanced chemical vapor deposition; transmission electron microscopy; vertically-aligned single-walled carbon nanotubes; Carbon nanotubes; Plasma chemistry; Plasma measurements; Plasma temperature; Probes; Production; Radio frequency; Scanning electron microscopy; Spectroscopy; Transmission electron microscopy;
Conference_Titel :
Nanotechnology, 2004. 4th IEEE Conference on
Print_ISBN :
0-7803-8536-5
DOI :
10.1109/NANO.2004.1392413
