Title :
Microfluidic channels fabricated using a lithography-free method
Author :
Pu, J. ; Sochol, R. ; Jiang, Y. ; Lin, L.
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
A lithography-free microchannel fabrication process with controlled pattern is demonstrated via the combination of Near Field Electrospinning (NFES) and molding of polydimethysiloxane (PDMS). Electrospun polymer fibers (1-10μm in width, 0.5-4μm in height) were patterned onto a silicon substrate to serve as the template. Microfluidic devices with parallel and grid-pattern microchannels were created and tested. By adjusting the electrospinning parameters, control of microchannel size was achieved. This methodology offers an effective, yet simple alternative way to lithography-based techniques for fabricating on-chip fluidic networks in MEMS, IC and biological fields.
Keywords :
lithography; microfabrication; microfluidics; IC; MEMS; NFES; biological fields; electrospun polymer fibers; grid-pattern microchannels; lithography-free microchannel fabrication process; microfiuidic devices; microfluidic channels; near field electtospinning; on-chip fluidic networks; polydimethysiloxane molding; size 0.5 mum to 4 mum; size 1 mum to 10 mum; Fabrication; Glass; Microchannel; Microfluidics; Noise measurement; Optical fiber devices; Substrates; Electrospinning; Microchannel; Near Field Electrospinning (NFES); Poly (vinylidene fluorid) PVDF; polydimethysiloxane (PDMS);
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969563