• DocumentCode
    2535782
  • Title

    Microfluidic channels fabricated using a lithography-free method

  • Author

    Pu, J. ; Sochol, R. ; Jiang, Y. ; Lin, L.

  • Author_Institution
    Univ. of Electron. Sci. & Technol. of China, Chengdu, China
  • fYear
    2011
  • fDate
    5-9 June 2011
  • Firstpage
    2374
  • Lastpage
    2377
  • Abstract
    A lithography-free microchannel fabrication process with controlled pattern is demonstrated via the combination of Near Field Electrospinning (NFES) and molding of polydimethysiloxane (PDMS). Electrospun polymer fibers (1-10μm in width, 0.5-4μm in height) were patterned onto a silicon substrate to serve as the template. Microfluidic devices with parallel and grid-pattern microchannels were created and tested. By adjusting the electrospinning parameters, control of microchannel size was achieved. This methodology offers an effective, yet simple alternative way to lithography-based techniques for fabricating on-chip fluidic networks in MEMS, IC and biological fields.
  • Keywords
    lithography; microfabrication; microfluidics; IC; MEMS; NFES; biological fields; electrospun polymer fibers; grid-pattern microchannels; lithography-free microchannel fabrication process; microfiuidic devices; microfluidic channels; near field electtospinning; on-chip fluidic networks; polydimethysiloxane molding; size 0.5 mum to 4 mum; size 1 mum to 10 mum; Fabrication; Glass; Microchannel; Microfluidics; Noise measurement; Optical fiber devices; Substrates; Electrospinning; Microchannel; Near Field Electrospinning (NFES); Poly (vinylidene fluorid) PVDF; polydimethysiloxane (PDMS);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
  • Conference_Location
    Beijing
  • ISSN
    Pending
  • Print_ISBN
    978-1-4577-0157-3
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2011.5969563
  • Filename
    5969563