Title :
Optical gradient force in a slot waveguide on a Silicon-on-Insulator-Chip
Author :
Roels, Joris ; Maes, B. ; Van Thourhout, D. ; Baets, R.
Author_Institution :
Dept. of Inf. Technol. (INTEC), Ghent Univ., Ghent, Belgium
Abstract :
We present the fabrication and characterization of a subpicogram micromechanical oscillator in a slot waveguide that is actuated through optical gradient force. The tunable slot width in fact creates an optomechanical phase modulator on a Silicon-on-Insulator-Chip.
Keywords :
micromechanical devices; optical fabrication; optical modulation; optical waveguides; silicon-on-insulator; optical gradient force; optomechanical phase modulator; silicon-on-insulator-chip; slot waveguide; subpicogram micromechanical oscillator; Optical buffering; Optical control; Optical filters; Optical modulation; Optical pumping; Optical resonators; Optical sensors; Optical surface waves; Optical waveguides; Phase modulation;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343285
