Title :
Imaging interferometric microscopy- resolution to the linear systems limits
Author_Institution :
Depts. of Phys. & Electr. & Comput. Eng., Univ. of New Mexico, Albuquerque, NM, USA
Abstract :
Imaging interferometric microscopy resolution to lambda/2(nsub+1) (nsub = substrate refractive index) is demonstrated using evanescent-wave illumination. Resolution to 150 nm (lambda/4.2) is achieved using a 633 nm source and a 0.4 NA lens.
Keywords :
fibre optic sensors; image resolution; interferometry; optical microscopy; evanescent-wave illumination; imaging interferometric microscopy; linear systems limits; Frequency; High-resolution imaging; Image reconstruction; Image resolution; Lighting; Linear systems; Optical microscopy; Optical scattering; Optical surface waves; Scanning electron microscopy;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343293