Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

Author

Yamahata, C. ; Sarajlic, E. ; Stranczl, M. ; Krijnen, G.J.M. ; Gijs, M.A.M.

Author_Institution

Lab. of Microsyst., Ecole Polytech. Fed. de Lausanne, Lausanne, Switzerland

fYear

2011

fDate

5-9 June 2011

Firstpage

1697

Lastpage

1700

Abstract

We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.

Keywords

CCD image sensors; Fourier transforms; discrete Fourier transforms; micromechanical devices; optical microscopes; CCD image; MEMS; charge-coupled device camera; digital microscope; discrete Fourier transform analysis; in-plane linear displacement; microelectromechanical system; optical microscope; quasi-static measurement; subnanometer resolution; subpixel translation; vibration isolation; video recording; Cameras; Charge coupled devices; Discrete Fourier transforms; Displacement measurement; Micromechanical devices; Microscopy; Pixel; Optical measurement; discrete Fourier transform; phase-shift measurement; subpixel resolution;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969574

Filename

5969574