Title :
Analysis of acoustic radiation and viscous damping on the vibration of piezoelectric circular microdiaphragms
Author :
Olfatnia, M. ; Kottapalli, A.G.P. ; Xu, T. ; Miao, J. ; Ong, L.S.
Author_Institution :
Sch. of Mech. & Aerosp. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
In this study, an analytical calculation was performed by using the Navier-Stokes equation for Newtonian fluids to investigate influences of acoustic radiation and viscous damping on the frequency and quality factor of piezoelectric circular microdiaphragms (PCM). Theoretical model shows that the ratio of contribution of viscosity over acoustic radiation term on the frequency shift of PCM mainly depends on (υ/hcp)0.5. This means, besides the kinematic viscosity, the thickness and the sound velocity in the plate are also two significant parameters in viscosity influences on the frequency shift of PCM. Throughout the work, theoretical and experimental values were compared and fairly good correlation was observed.
Keywords :
Navier-Stokes equations; Q-factor; acoustic radiators; damping; diaphragms; micromechanical devices; piezoelectric devices; vibrations; viscosity; Navier-Stokes equation; Newtonian fluids; PCM; acoustic radiation; kinematic viscosity; piezoelectric circular microdiaphragm vibration; quality factor; sound velocity; viscous damping; Damping; Ethanol; Phase change materials; Q factor; Resonant frequency; Viscosity; Microdiaphragm; Piezoelectric; Quality factor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969577