Title :
Nonlinear air drag damping of torsional microscanners
Author_Institution :
MicroVision, Inc., Redmond, WA, USA
Abstract :
An empirical model is described for the air drag damping of resonant torsional microscanners. Experimentally determined drag coefficients are presented for four scanning mirror designs, and comparisons between the designs suggest that a simple empirical model for the damping of such devices can be predictive.
Keywords :
damping; micromirrors; optical scanners; drag coefficients; nonlinear air drag damping; scanning mirror; torsional microscanners; Atmospheric modeling; Damping; Drag; Frequency measurement; Micromechanical devices; Mirrors; Q measurement; MEMS scanning mirror; Nonlinear damping; drag coefficient; quality factor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969585
