Novel, simple, and Q-independent self oscillation loop designed for vibratory MEMS gyroscopes

Author

Eminoglu, B. ; Alper, S.E. ; Akin, T.

Author_Institution

Dept. of Electr. & Electron. Eng., Middle East Tech. Univ., Ankara, Turkey

fYear

2011

fDate

5-9 June 2011

Firstpage

1440

Lastpage

1443

Abstract

This paper presents a novel self oscillation loop with a very simple architecture that is independent of quality factor (Q) variations in packaged vibratory MEMS gyroscopes, providing identical start-up performance at different ambient conditions. The new self-oscillation loop circuitry has been fabricated in a 0.6μm CMOS process, tested with a fabricated MEMS gyroscope, and demonstrated start-up characteristics without any overshoot and with a settling time of only 28msec. An angle random walk value of 0.037°/√hr and a bias instability value of 3°/hr are achieved using this new self-oscillation loop.

Keywords

CMOS integrated circuits; Q-factor; gyroscopes; microsensors; CMOS process; Q-independent self oscillation loop designed; fabricated MEMS gyroscope; packaged vibratory MEMS gyroscopes; quality factor; size 0.6 mum; time 28 ms; Gyroscopes; Harmonic analysis; Micromechanical devices; Negative feedback; Oscillators; Q factor; Steady-state; MEMS gyroscopes; drive mode controller; self-oscillation loop;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969590

Filename

5969590