A Frenkel-Poole model of dielectric charging in CMOS MEMS

Electrostatic actuation is commonly used for MEMS devices such as resonators, sensors, and RF switches, but parasitic charge in the dielectric layers of the devices may cause performance issues (e.g., drift, pull-in) or decreased device lifetime. We present a precise predictive model of dielectric charging in a CMOS MEMS resonator using Frenkel-Poole conduction. The model is able to predict frequency drift within 5% of measured drift data. Use of these predictive models will lead to electrostatically actuated MEMS devices with increased stability.