Temperature compensation of thickness shear mode resonators formed on artificial twinned quartz plates

This paper presents a temperature compensation technique for a thickness shear mode resonator formed on an artificial twin quartz plate. The author reports on a technique to form X-axis inverted areas on a quartz plate. Because the X-axis inverted area can be formed with an arbitrary pattern, many applications are possible. Temperature compensation for AT-cut resonators proposed here is one promising application of the artificial twin quartz formation technique. The X-axis inverted areas are formed near a trapped energy mode AT-cut resonator. Energy of the vibration leaked into the X-axis inverted areas affects the frequency temperature characteristics of the resonator. Theoretical analysis of temperature compensation based on the trapped energy mode theory is presented. Experimental results suggest the possibility of improving the frequency temperature characteristics