Title :
A three-terminal single-walled carbon nanotube thin film MEMS switch for digital logic applications
Author :
Jang, Min-Woo ; Chen, Chia-Ling ; Partlo, Walter E., III ; Patil, Shruti R. ; Lee, Dongjin ; Ye, Zhijiang ; Lilja, David ; Taton, T. Andrew ; Cui, Tianhong ; Campbell, Stephen A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
An all single-walled carbon nanotube film was deposited through layer-by-layer self-assembly without use of a copolymer, resulting in 75% reduction of resistivity compared to previous composite films made with copolymer. The deposited film thickness could be well controlled by changing the number of dipping cycles. Moreover, a 3-terminal electromechanical switch built with this thin film behaved like a NAND gate. The on/off ratio of the device and the electrical properties of the film were dramatically improved through thermal treatments.
Keywords :
carbon nanotubes; logic gates; microswitches; self-assembly; thin film devices; NAND gate; digital logic; dipping cycle; electromechanical switch; layer by layer self-assembly; single-walled carbon nanotube film; thin film MEMS switch; Carbon nanotubes; Conductivity; Films; Logic gates; Metals; Self-assembly; Switches; 3-terminal fixed-fixed beam switch; All-SWNT thin film; Layer-by-layer assembly;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969607
