DocumentCode
2536687
Title
Acoustic plate mode properties of rotated Y-cut quartz
Author
Jeffrey, C. ; Schweyer, Michael G. ; Vetellino, J.F.
Author_Institution
Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA
fYear
1996
fDate
5-7 Jun 1996
Firstpage
532
Lastpage
539
Abstract
Recent demands for compact, low cost, accurate sensors for fluid phase operation have been largely unmet. Among the most promising technologies are piezoelectric sensors. The piezoelectric sensors directly detect mechanical and electrical property changes caused by the analyte and are thus amenable to continuous monitoring of fluid streams. The current effort is directed towards the development of trace ion (e.g. mercury) and biochemical (e.g. DNA, antibodies, toxins) detection. Several candidate structures have been proposed and many have been shown to be feasible for fluid phase sensing; however, the best experimental piezoelectric sensor results published to date employed the SHAPM structure. The sensors detected approximately 10 ng/ml of such analytes as mercury, human IgG and cholera toxin and employed lithium niobate plate mode devices. The X-propagating Z-cut (ZX) lithium niobate wafers provide low propagation loss, high mass sensitivity, high electrical coupling and a single electrically-dominant acoustic mode. The principal drawback is the poor temperature stability of the material (-78 ppm/°C). In order to obtain better results the residual temperature instability of lithium niobate must be overcome while not substantially sacrificing its advantageous properties. In order to accomplish this, the current work analyzes potentially temperature stable plate modes in quartz crystals for dominant, temperature-stable, electrically-efficient, mass-sensitive acoustic modes with low propagation loss under fluid loading
Keywords
acoustic resonators; piezoelectric transducers; quartz; SHAPM structure; SiO2; X-propagating Z-cut; acoustic plate mode properties; biochemical detection; electrical coupling; electrically-dominant acoustic mode; fluid phase sensing; fluid stream monitoring; mass sensitivity; piezoelectric sensors; plate modes; propagation loss; residual temperature instability; rotated Y-cut quartz; trace ion detection; Acoustic sensors; Acoustic signal detection; Biosensors; Costs; Lithium niobate; Mechanical factors; Mechanical sensors; Monitoring; Propagation losses; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.
Conference_Location
Honolulu, HI
Print_ISBN
0-7803-3309-8
Type
conf
DOI
10.1109/FREQ.1996.559922
Filename
559922
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