Title :
Development of the micro-mirror with large scaning angle using FE-based metallic glass thin film
Author :
Lee, Jae-Wung ; Lin, Yu-Ching ; Kaushik, Neelam ; Sharma, Parmanand ; Inoue, Akihisa ; Esashi, Masayoshi ; Gessner, Thomas
Author_Institution :
WPI Adv. Inst. for Mater. Res., Tohoku Univ., Sendai, Japan
Abstract :
In order to realize the large tilting angle of micro-mirror devices without mechanical failure, the mirror structure was fabricated using a Fe-based metallic glass (MG) thin film. The micro-mirrors with mirror-plate diameter of 900μm and torsion bar dimensions; length 250μm, width 30μm and thickness 3μm were fabricated. Extremely large tilting angle of ± 270° was obtained on activation of mirror by using a permanent magnet. And when 93mA was applied to the driving set-up using Lorentz force, over 75° of mechanical angle was obtained. Large tilting angle of micro-mirror is due to the torsion bar which was fabricated with Fe-based MG thin film that has large elastic strain limit, excellent magnetic and mechanical properties.
Keywords :
elasticity; iron alloys; metallic glasses; metallic thin films; microfabrication; micromirrors; permanent magnets; current 93 mA; elastic strain limit; large scanning angle; magnetic properties; mechanical properties; metallic glass thin film; micromirror; permanent magnet; size 250 mum; size 3 mum; size 30 mum; size 900 mum; tilting angle; torsion bar dimensions; Frequency measurement; Magnetic films; Magnetic resonance imaging; MEMS; Metallic glass; Micro-mirror;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969618
