Title :
Characterization of the 2nd generation magnetic microbearing with integrated stabilization for frictionless devices
Author :
Badilita, V. ; Rzesnik, S. ; Kratt, K. ; Wallrabe, U.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
We present for the first time a full characterization of a microbearing based on stabilized magnetic levitation. The device consists of two coaxial wirebonded solenoidal microcoils (2000 μm and 3600 μm diameter) for levitation and stabilization purposes respectively. We demonstrate controlled vertical positioning of an Al plate (25 μm thick, 3200 μm diameter) ranging up to 150 μm at an excitation signal with frequency f = 2 MHz and 105 mA effective current in the levitation microcoil. The positioning error is 2.6 μm.
Keywords :
aluminium; machine bearings; magnetic levitation; micromechanical devices; solenoids; 2nd generation magnetic microbearing; Al; coaxial wirebonded solenoidal microcoils; controlled vertical positioning; excitation signal; frictionless devices; integrated stabilization; magnetic levitation; size 150 mum; size 25 mum; size 3200 mum; Coils; Fabrication; Facsimile; Laboratories; Levitation; Microactuators; Windings; Magnetic microbearing; levitation; microcoil;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969624
