Nano-opto-mechanical actuator driven by optical radiation force

This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.