Title :
A hybrid vertical comb-drive actuator supported by flexible pdms suspensions
Author :
Lee, M. ; Chen, Y. -C ; Chang, C. ; Hou, M. ; Chen, R.
Author_Institution :
Inst. of NanoEngineering & Microsyst., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
In this work, we proposed a hybrid PDMS-silicon electrostatic actuator with a large stroke under low driving voltages. The device features a staggered vertical comb-drive suspended by PDMS springs. Because of the flexibility of PDMS, an initial staggered displacement was naturally formed due to the self-weight of the device. Experimental results showed that the combination of polymeric springs and silicon structures enabled the large stroke of 3.73 μm at 3.5 kHz. The presented heterogeneous integration technology improves the performance and may bring new functionalities to micro-systems.
Keywords :
electrostatic actuators; microfabrication; electrostatic actuator; flexible pdms suspensions; hybrid vertical comb-drive actuator; low driving voltages; polymeric springs; silicon structures; staggered displacement; Actuators; Etching; Fabrication; Micromechanical devices; Silicon; Springs; Suspensions; Heterogeneous vertical; Hybrid MEMS; PDMS; comb-drive actuator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969630
