Title :
Silicon linkage with novel compliant mechanism for piezoelectric actuation of an intraocular implant
Author :
Martin, Th ; Gengenbach, U. ; Ruther, P. ; Paul, O. ; Bretthauer, G.
Author_Institution :
Inst. for Appl. Comput. Sci., Karlsruhe Inst. of Technol., Karlsruhe, Germany
Abstract :
An implantable mechatronic microsystem is a new approach to restore the accommodation ability of the human eye. For change of refractive power a lens shift is performed by an actuator subsystem. This paper presents a silicon linkage based on a novel compliant mechanism that amplifies the displacement of a piezoelectric bender to sufficiently drive the optics of an Artificial Accommodation System. Finite element analysis is conducted to calculate and optimize the performance of the linkage fabricated using deep reactive ion etching of single-crystal silicon. Measurements were carried out to characterize the geometry, elastic behavior, and kinematic performance of the structures. The results indicate sufficient amplification of the piezoelectric bender´s displacement by the linkage to generate the required lens shift.
Keywords :
couplings; eye; lenses; mechatronics; micro-optomechanical devices; microactuators; optical fabrication; piezoelectric actuators; prosthetics; sputter etching; Si; accommodation ability; actuator subsystem; artificial accommodation system; deep reactive ion etching; finite element analysis; human eye; implantable mechatronic microsystem; intraocular implant; lens shift; piezoelectric actuation; piezoelectric bender; refractive power; silicon linkage; single crystal silicon; Actuators; Couplings; Fasteners; Implants; Lenses; Manganese; Silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969631