Silicon linkage with novel compliant mechanism for piezoelectric actuation of an intraocular implant

An implantable mechatronic microsystem is a new approach to restore the accommodation ability of the human eye. For change of refractive power a lens shift is performed by an actuator subsystem. This paper presents a silicon linkage based on a novel compliant mechanism that amplifies the displacement of a piezoelectric bender to sufficiently drive the optics of an Artificial Accommodation System. Finite element analysis is conducted to calculate and optimize the performance of the linkage fabricated using deep reactive ion etching of single-crystal silicon. Measurements were carried out to characterize the geometry, elastic behavior, and kinematic performance of the structures. The results indicate sufficient amplification of the piezoelectric bender´s displacement by the linkage to generate the required lens shift.