DocumentCode
2537399
Title
Large-scale array of small high-Q microdisk resonators for onchip spectral analysis
Author
Soltani, Mohammad ; Li, Qing ; Yegnanarayanan, Siva ; Momeni, Babak ; Eftekhar, Ali Asghar ; Adibi, Ali
Author_Institution
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2009
fDate
4-8 Oct. 2009
Firstpage
703
Lastpage
704
Abstract
We demonstrate on-chip, large-scale arrays of small high-Q microdisk resonators, suitable for both in-plane coupling and out-of-plane (imaging) spectral analysis devices with high resolution (linewidth < 50 pm to 0.5 nm), and large FSR (> 50 nm).
Keywords
integrated optics; micro-optics; micromechanical resonators; spectral analysis; high resolution; in-plane coupling; large scale array; onchip spectral analysis; out-of-plane spectral analysis; small high-Q microdisk resonators; Couplings; High-resolution imaging; Image resolution; Large-scale systems; Optical imaging; Optical resonators; Resonance; Resonator filters; Silicon; Spectral analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location
Belek-Antalya
ISSN
1092-8081
Print_ISBN
978-1-4244-3680-4
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2009.5343377
Filename
5343377
Link To Document