Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications

Author

Lu, J. ; Zhang, Y. ; Itoh, T. ; Maeda, R.

Author_Institution

Res. Center for Ubiquitous MEMS & Micro Eng. (UMEMSME), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba, Japan

fYear

2011

fDate

5-9 June 2011

Firstpage

514

Lastpage

517

Abstract

The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power consumption. By optimizing the size, location of the PZT-electrode stacks, and the layout of the silicon disk to compress energy dissipation, dramatically improved quality-factor (Q-factor) was achieved both in air (Q=1319) and under reduced pressure (Q=5028 at the pressure of 300Pa).

Keywords

CMOS integrated circuits; impedance matching; lead compounds; micromechanical resonators; microsensors; piezoelectric transducers; wireless sensor networks; zirconium compounds; CMOS integrated circuit; PZT; disk self-actuation; impedance matching; integrated MEMS; micro disk resonator; microelectromechanical systems; on-disk piezoelectric thin film transducer; pressure 300 Pa; self-sensing; ubiquitous applications; wireless sensor network; Energy dissipation; Layout; Micromechanical devices; Q factor; Silicon; Transducers; Wireless sensor networks; MEMS; PZT; disk resonator; piezoelectric transducer; quality-factor; wireless sensor network;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969669

Filename

5969669