An EWOD driven millimeter-wave phase shifter using a movable ultrasoft metalized PDMS ground plane

Author

Hage-Ali, Sami ; Tiercelin, Nicolas ; Lapierre, Florian ; Orlic, Yovan ; Harnois, Maxime ; Thomy, Vincent ; Preobrazhensky, Vladimir ; Pernod, Philippe ; Coquet, Philippe

Author_Institution

Joint Int. Lab. LEMAC, PRES Univ. Lille Nord de France, Villeneuve-d´´Ascq, France

fYear

2011

fDate

5-9 June 2011

Firstpage

522

Lastpage

525

Abstract

This paper reports a novel millimeter-wave microstrip phase shifter on quartz substrate with a key feature: the use of a reconfigurable ground plane supported by a metalized ultrasoft PDMS (Polydimethylsiloxane) membrane, associated to an EWOD (ElectroWetting On Dielectric) vertical actuator.

Keywords

actuators; dielectric devices; membranes; millimetre wave phase shifters; polymers; wetting; EWOD driven millimeter-wave microstrip phase shifter; EWOD vertical actuator; SiO₂; electrowetting on dielectric driven millimeter-wave microstrip phase shifter; electrowetting on dielectric vertical actuator; movable ultrasoft metalized PDMS ground plane membrane; movable ultrasoft metalized polydimethylsiloxane ground plane membrane; quartz substrate; Actuators; Micromechanical devices; Microstrip; Optical switches; Phase shifters; Radio frequency; Substrates; EWOD; PDMS membrane; Phase shifter;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969671

Filename

5969671