Title :
Novel frequency agile electromagnetic decoupling MEMS device
Author :
Jang, Yun-Ho ; Llamas-Garro, Ignacio ; Kim, Jung-Mu ; Kim, Yong-Kweon
Author_Institution :
Seoul Nat. Univ., Seoul, South Korea
Abstract :
We firstly propose the concept of a frequency agile electromagnetic decoupling MEMS-based device. We experimentally show the feasibility of such an apparatus, and further work consists in cascading more than one decoupling device to achieve stronger electromagnetic decoupling values. The structure consists of a freestanding half-wavelength resonator mounted on a movable shuttle connected with large displacement comb actuators. The lateral movement of the shuttle over the main transmission line produces different electromagnetic decoupling values with a variable center frequency. The freestanding resonator plays the role of a loading capacitor as well as the decoupling mechanism in the proposed structure. The device is able to produce diverse decoupling and center frequency effects depending on the overlapping region between the main line and the movable shuttle.
Keywords :
microactuators; microstrip resonators; comb actuator; freestanding half wavelength resonator; frequency agile electromagnetic decoupling MEMS device; loading capacitor; movable shuttle; Glass; Gold; Micromechanical devices; Optical switches; Radio frequency; Silicon; Electromagnetic decoupling; RF MEMS; comb actuator; filter; half-wavelength resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969672