Title :
Piezoelectric ALN MEMS resonators with high coupling coefficient
Author :
Khine, Lynn ; Soon, Jeffrey B W ; Tsai, Julius M.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Piezoelectric AlN resonators with novel checker-patterned electrode architecture are reported in this paper. An array of interdigitated electrodes is used to excite two-dimensional plate acoustic waves within a thin piezoelectric layer. The resonant frequency can be changed by adjusting the size of the electrode fingers and hence resonators with multiple frequencies can be fabricated on a single wafer. A high coupling coefficient of 3.95% has been measured for one of the checker-mode resonators. A comparison of measured S21 plots of a checker-mode resonator and a contour-mode resonator with similar resonant frequency shows that checker mode is highly specific over a large frequency range.
Keywords :
III-V semiconductors; aluminium compounds; bulk acoustic wave devices; electrodes; micromechanical resonators; piezoelectric devices; wide band gap semiconductors; AlN; S21 plots; checker-mode resonators; checker-patterned electrode architecture; contour-mode resonator; electrode fingers; high coupling coefficient; interdigitated electrode array; piezoelectric MEMS resonators; piezoelectric layer; resonant frequency; two-dimensional plate acoustic waves; Acoustic waves; Couplings; Electrodes; Finite element methods; Resonant frequency; Silicon; Bulk acoustic wave; RF-MEMS; micromechanical; piezoelectric resonators;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969674