Wideband tunable love wave filter using electrostatically-actuated MEMS variable capacitors integrated on lithium niobate

Author

Yasue, T. ; Komatsu, T. ; Nakamura, N. ; Hashimoto, K. ; Hirano, H. ; Esashi, M. ; Tanaka, S.

Author_Institution

Tohoku Univ., Sendai, Japan

fYear

2011

fDate

5-9 June 2011

Firstpage

1488

Lastpage

1491

Abstract

A tunable bandpass filters with low insertion loss, sharp cut-off characteristics, wide bandwidth and wide tunability is strongly expected for future reconfigurable and cognitive wireless systems. We have demonstrated a wideband tunable filter with the center frequency of 1.08 GHz by directly integrating Love wave resonators and electrostatically-actuated MEMS variable capacitors on a 15 ° Y LiNbO₃ wafer. The Love wave resonators have an extremely large electromechanical coupling coefficient (k² ~ 30%), providing wide bandwidth and wide tuning range. We confirmed that the 3 dB bandwidth was tuned from 146 MHz to 130 MHz by applying 15 V to one of the MEMS variable capacitors.

Keywords

Love waves; UHF filters; band-pass filters; capacitors; circuit tuning; lithium compounds; micromechanical resonators; surface acoustic wave resonator filters; LiNbO₃; SAW-based tunable filter; bandwidth 146 MHz to 130 MHz; cognitive wireless systems; electromechanical coupling; electrostatically-actuated MEMS variable capacitors; frequency 1.08 GHz; lithium niobate; tunable bandpass filters; voltage 15 V; wideband tunable Love wave filter; Band pass filters; Bandwidth; Capacitors; Fabrication; Optical resonators; Resonant frequency; Resonator filters; Love wave; SAW filter; Tunable filter; Variable capacitor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969676

Filename

5969676