Title :
3-D microcoils as a metamaterial with electric and magnetic response
Author :
Kratt, K. ; Waselikowski, S. ; Badilita, V. ; Wallrabe, U. ; Walther, M. ; Korvink, J.G.
Author_Institution :
Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany
Abstract :
This paper reports a terahertz metamaterial consisting of 3-D microcoils fabricated with an automatic wire bonder in a fully MEMS-compatible manner. The response of the system to an incident electromagnetic wave was characterized by terahertz time-domain spectroscopy (TDS) and by numerical simulations. Depending on the light polarization relative to the structure, fundamental and higher order electric or magnetic resonances were excited in the coils.
Keywords :
coils; electromagnets; magnetic resonance; metamaterials; micromechanical devices; microwave materials; terahertz spectroscopy; 3D microcoils; MEMS compatible; automatic wire bonder; electric resonance; electric response; incident electromagnetic wave; light polarization; magnetic resonance; magnetic response; terahertz metamaterial; terahertz time domain spectroscopy; Coils; Magnetic materials; Metamaterials; Optical device fabrication; Optical polarization; Resonant frequency; Wires; metamaterial; microcoil; terahertz; wire bonding;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969679
