3-D microcoils as a metamaterial with electric and magnetic response

Author

Kratt, K. ; Waselikowski, S. ; Badilita, V. ; Wallrabe, U. ; Walther, M. ; Korvink, J.G.

Author_Institution

Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg, Germany

fYear

2011

fDate

5-9 June 2011

Firstpage

2666

Lastpage

2669

Abstract

This paper reports a terahertz metamaterial consisting of 3-D microcoils fabricated with an automatic wire bonder in a fully MEMS-compatible manner. The response of the system to an incident electromagnetic wave was characterized by terahertz time-domain spectroscopy (TDS) and by numerical simulations. Depending on the light polarization relative to the structure, fundamental and higher order electric or magnetic resonances were excited in the coils.

Keywords

coils; electromagnets; magnetic resonance; metamaterials; micromechanical devices; microwave materials; terahertz spectroscopy; 3D microcoils; MEMS compatible; automatic wire bonder; electric resonance; electric response; incident electromagnetic wave; light polarization; magnetic resonance; magnetic response; terahertz metamaterial; terahertz time domain spectroscopy; Coils; Magnetic materials; Metamaterials; Optical device fabrication; Optical polarization; Resonant frequency; Wires; metamaterial; microcoil; terahertz; wire bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969679

Filename

5969679