Title :
Opto-acoustic oscillator using silicon MEMS optical modulator
Author :
Sridaran, Suresh ; Bhave, Sunil A.
Author_Institution :
OxideMEMS Lab., Cornell Univ., Ithaca, NY, USA
Abstract :
We show operation of a silicon MEMS based narrow-band optical modulator with large modulation depth by improving the electro-mechanical transducer. We demonstrate an application of the narrowband optical modulator as both the filter and optical modulator in an opto-electronic oscillator loop to obtain a 236.22 MHz Opto-Acoustic Oscillator (OAO) with phase noise of -68 dBc/Hz at 1 kHz offset.
Keywords :
electromechanical effects; elemental semiconductors; micromechanical devices; optical modulation; oscillators; phase noise; photoacoustic effect; silicon; MEMS based narrowband optical modulator; OAO; Si; electro-mechanical transducer; frequency 236.22 MHz; opto-acoustic oscillator; phase noise; Optical filters; Optical modulation; Optical resonators; Optical scattering; Oscillators; Radio frequency; MEMS based Optical Modulator; Opto-Acoustic Oscillator; Optomechanics; RF MEMS resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969691
