On-chip RF inductors with magnetic nano particles medium

Author

Yang, C. ; Koh, K. ; Zhu, X. ; Lin, L.

Author_Institution

Univ. of California, Berkeley, CA, USA

fYear

2011

fDate

5-9 June 2011

Firstpage

2801

Lastpage

2804

Abstract

This paper presents on-chip planar inductors fully filled with magnetic-nano-particles-medium (MNPM) for compact and high-performance RF IC applications. In the prototype design, planar inductors have been constructed by using a filling process using nickel-ion permalloy (Ni₈₀Fe₁₇Mo₃) of sub-100nm in diameter to increase the inductance while maintaining the magnetic performance for high-frequency circuitry. Preliminary results of stripline sample show more than 100% enhancement in inductance (L) with quality factor (Q) of about 20 up to 8GHz, which is very promising for RF ICs.

Keywords

inductors; iron alloys; magnetic particles; microwave integrated circuits; molybdenum alloys; nanomagnetics; nanoparticles; nickel alloys; Ni₈₀Fe₁₇Mo₃; Q quality; RFIC application; filling process; inductance enhancement; magnetic-nano-particle-medium; on-chip RF inductor; on-chip planar inductor; quality factor; size 100 nm; stripline sample; Inductors; Magnetic circuits; Magnetomechanical effects; Perpendicular magnetic anisotropy; Radio frequency; Saturation magnetization; Inductor; Magnetic Medium; Nano Particle; RF-MEMS;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969699

Filename

5969699