Independent tuning of quality factor and resonant frequency of torsional micro-resonators for timing and sensing applications

This paper reports on a novel approach to control losses in torsional microresonators for applications that require high precision. This methodology is demonstrated through realizing an array of electrostatically coupled microresonators with independent tuning of both quality factor and resonant frequency. Different anchor designs were used to evaluate their roles on effectiveness of the technique. The presented approach enables both boosting and reducing the quality factor of a resonator using proper drive signals to the tuning electrodes. The experimental data demonstrates variations as much as +33% and -37% from the initial quality factor value with negligible frequency change.