A novel electromagnetic microactuator with lateral magnetio-static force for scanning micromirror device

A novel electromagnetic microactuator with lateral magneto-static force was developed in this study for scanning micromirror device. The actuation performances in different vacuum degrees were also examined for verification. The present device assembled a tiny permanent magnet on a supporting beam to couple with a fixed solenoid coil for driving a micromirror plate in vibration. In an ambient environment, the corresponding scanning angle to the fast axis is 11.2 degrees at the first resonate frequency 4434 Hz. The maximum scanning angle for the case of fast scanning at the vacuum degree of 76 mTorr is increased by 31% compared with that of 760 Torr. The thermal effect induced by the coil is minimized to scanning quality, even at high vacuum environments. Thus, based on the results of this study, high reliability with high vacuum packaging can be expected.