Process optimization and performance analysis of an electrostatically actuated varifocal liquid lens

Author

Pouydebasque, A. ; Bolis, S. ; Bridoux, C. ; Jacquet, F. ; Moreau, S. ; Sage, E. ; Saint-Patrice, D. ; Bouvier, C. ; Kopp, C. ; Sillon, N. ; Fanget, S. ; Vigier-Blanc, E.

Author_Institution

CEA-Leti, Grenoble, France

fYear

2011

fDate

5-9 June 2011

Firstpage

578

Lastpage

581

Abstract

A new type of varifocal liquid lens actuated by electrostatic parallel plates is presented and the main technological steps involved in the fabrication process are discussed. The influences of the membrane material, the electrode size and the optical diameter on the optical performance of the lens are characterized using wave-front measurements giving basic design rules for the device performance optimization. Optical powers of 13m^-1 at 20V and 11m^-1 at 13V are measured on lenses with optical diameters of 3mm and 1.5mm respectively. When placed ahead of a 3Mp camera module, the variable-focus liquid lens permits to focus on the different parts of a scene by changing the applied voltage.

Keywords

electrostatic actuators; lenses; optimisation; electrode size; electrostatic parallel plates; electrostatically actuated varifocal liquid lens; membrane material; optical diameter; performance analysis; process optimization; size 1.5 mm; size 3 mm; voltage 13 V; voltage 20 V; wavefront measurements; Adaptive optics; Electrodes; Lenses; Optical device fabrication; Optical imaging; Optical variables measurement; Voltage measurement; Liquid lens; electrostatic actuation; variable-focus lens;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International

Conference_Location

Beijing

ISSN

Pending

Print_ISBN

978-1-4577-0157-3

Type

conf

DOI

10.1109/TRANSDUCERS.2011.5969719

Filename

5969719