DocumentCode
2538491
Title
A Nano-opto-mechanical pressure sensor
Author
Zhao, X. ; Tsai, J.M. ; Cai, H. ; Ji, X.M. ; Zhou, J. ; Bao, M.H. ; Huang, Y.P. ; Kwang, D.L. ; Liu, A.Q.
Author_Institution
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
fYear
2011
fDate
5-9 June 2011
Firstpage
582
Lastpage
585
Abstract
A Nano-opto-mechanical pressure sensor using optical force is reported in this paper. The pressure sensor consists of a square diaphragm, a ring resonator and four waveguides. By applying a pressure ranging from 900 kPa to 990 kPa, the output intensity ratio sensitivity of -2.272 /kPa is achieved. Compared with traditional MEMS pressure sensor, the proposed ring pressure sensor has advantages such as higher sensitivity and resolution, which could be applied to acoustic pressure sensors and microphones etc.
Keywords
nanophotonics; nanosensors; pressure sensors; MEMS pressure sensor; microphones; nanooptomechanical pressure sensor; optical force; pressure 900 kPa to 990 kPa; ring resonator; square diaphragm; Facsimile; Optical ring resonators; Nano-opto-mechanical systems (NOMS); optical force; ring resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location
Beijing
ISSN
Pending
Print_ISBN
978-1-4577-0157-3
Type
conf
DOI
10.1109/TRANSDUCERS.2011.5969721
Filename
5969721
Link To Document