Title :
Nanomechanical systems: progress, challenges, and ultimate limits
Author_Institution :
California Inst. of Technol., Pasadena, CA, USA
Abstract :
Microelectronics technology is now pushing deep into the submicron regime, yet, for the most part, work on micromachines still remains back at the few micron scale, or larger. The time is ripe to embark upon a concerted exploration of mechanical systems at the nanoscale. This talk highlights the promise and intrigue of the nanoelectromechanical systems (NEMS) domain.
Keywords :
micromachining; micromechanical devices; nanotechnology; NEMS; microelectronics technology; micromachines; nanoelectromechanical systems; nanomechanical systems; nanoscale mechanical systems; Frequency; Magnetic force microscopy; Magnetic resonance imaging; Mechanical variables measurement; Micromechanical devices; Nanoelectromechanical systems; Nanoscale devices; Quantum mechanics; Thermal conductivity; Thermal force;
Conference_Titel :
Device Research Conference, 2000. Conference Digest. 58th DRC
Conference_Location :
Denver, CO, USA
Print_ISBN :
0-7803-6472-4
DOI :
10.1109/DRC.2000.877106
