DocumentCode
2538785
Title
Nanomechanical systems: progress, challenges, and ultimate limits
Author
Roukes, M.
Author_Institution
California Inst. of Technol., Pasadena, CA, USA
fYear
2000
fDate
19-21 June 2000
Firstpage
99
Lastpage
100
Abstract
Microelectronics technology is now pushing deep into the submicron regime, yet, for the most part, work on micromachines still remains back at the few micron scale, or larger. The time is ripe to embark upon a concerted exploration of mechanical systems at the nanoscale. This talk highlights the promise and intrigue of the nanoelectromechanical systems (NEMS) domain.
Keywords
micromachining; micromechanical devices; nanotechnology; NEMS; microelectronics technology; micromachines; nanoelectromechanical systems; nanomechanical systems; nanoscale mechanical systems; Frequency; Magnetic force microscopy; Magnetic resonance imaging; Mechanical variables measurement; Micromechanical devices; Nanoelectromechanical systems; Nanoscale devices; Quantum mechanics; Thermal conductivity; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2000. Conference Digest. 58th DRC
Conference_Location
Denver, CO, USA
Print_ISBN
0-7803-6472-4
Type
conf
DOI
10.1109/DRC.2000.877106
Filename
877106
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