Title :
Adaptive piezoelectric axicon mirrors for high power femtosecond laser applications
Author :
Brunne, J. ; Grunwald, R. ; Wallrabe, U.
Author_Institution :
Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg, Germany
Abstract :
In this work, we present the first mechanically tunable axicon mirror. The intended applications for such a device are nanomachining with high energy femtosecond lasers, microscopy and optical tweezers. The device consists of a piezodisc with structured electrodes, a reflective layer and a soft PDMS supporting ring that allows a rotational movement of the device around its outer perimeter. The performance of the device is optimized by an automated FEM-Simulation. A rapid prototyping fabrication process is presented as well as the mechanical and optical characterization of the system.
Keywords :
finite element analysis; laser beam applications; lenses; micromachining; mirrors; nanotechnology; optical fabrication; optical microscopy; optimisation; piezoelectric devices; radiation pressure; FEM; PDMS; adaptive piezoelectric axicon mirrors; fabrication process; femtosecond laser; microscopy; nanomachining; optical tweezers; optimization; piezodisc; rapid prototyping; Electrodes; Laser beams; Mirrors; Optical device fabrication; Optical interferometry; Substrates; Ultrafast optics; Adaptive axicon; conical spatial light modulator; femtosecond laser;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International
Conference_Location :
Beijing
Print_ISBN :
978-1-4577-0157-3
DOI :
10.1109/TRANSDUCERS.2011.5969737
