Title :
Fabrication of planar GaN-based micro-pixel light emitting diode arrays
Author :
Massoubre, D. ; McKendry, J. ; Guilhabert, B. ; Gong, Z. ; Watson, I.M. ; Gu, E. ; Dawson, M.D.
Author_Institution :
Inst. of Photonics, Univ. of Strathclyde, Glasgow, UK
Abstract :
We report a new processing approach which enables the fabrication of planar GaN-based micro-pixel LED arrays. This process is based on selective passivation of the p-doped GaN surface by a CHF3 plasma treatment.
Keywords :
III-V semiconductors; carbon compounds; gallium compounds; hydrogen compounds; light emitting diodes; optical fabrication; wide band gap semiconductors; CHF3; micro-pixel light emitting diode arrays fabrication; plasma treatment; Conductivity; Fabrication; Gallium nitride; Light emitting diodes; Optical arrays; Passivation; Plasma applications; Plasma devices; Plasma properties; Surface treatment;
Conference_Titel :
LEOS Annual Meeting Conference Proceedings, 2009. LEOS '09. IEEE
Conference_Location :
Belek-Antalya
Print_ISBN :
978-1-4244-3680-4
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2009.5343456
